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Uncooled thin film infrared imaging device with aerogel thermal isolation: Deposition and planarization techniques

机译：具有气凝胶热隔离的非制冷薄膜红外成像装置：沉积和平坦化技术

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Ruffner, J.A.; Clem, P.G.; Tuttle, B.A.; Brinker, C.J.; Sriram, C.S.; Bullington, J.A.;
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年度 1998
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3. The bolometric characteristic of thermally oxidized thin nickel film for an uncooled infrared image sensor [J] . Kim D.S., Kwon I.W., Lee Y.S., Infrared physics and technology . 2011,第1期

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5. Reactive sputter deposition of vanadium, nickel, and molybdenum oxide thin films for use in uncooled infrared imaging. [D] . Jin, Yao. 2014

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7. Uncooled thin film infrared imaging device with aerogel thermal isolation: deposition and planarization techniques [O] . J.A. Ruffner, P.G. Clem, B.A. Tuttle, 1998

机译：带气凝胶热隔离的未冷却薄膜红外成像装置：沉积和平坦化技术

Uncooled thin film infrared imaging device with aerogel thermal isolation: Deposition and planarization techniques

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